Turkey has over the past weeks criticized European nations for refusing to take back their nationals.
Interior Minister Suleyman Soylu had warned last week IS militants would be sent to their home countries even if their citizenships have been revoked.
Although the 1961 New York Convention made it illegal to leave people stateless, several countries, including Britain and France, have not ratified it, and recent cases have triggered prolonged legal battles.
A US and a Danish national were deported from Turkey on Monday, while a German national was scheduled to be deported later in the day, Turkey's state-run Anadolu Agency quoted Interior Ministry spokesman Ismail Catakli as saying.
A French official said that the French nationals being expelled were mostly women.
Turkish President Recep Tayyip Erdogan has indicated that some 2,500 foreign IS fighters are in prison in Turkey.
The man remains under the purview of Turkish authorities. Denmark, Germany and Britain have so far revoked some citizenships.
The legal proceedings for the two Irish national terrorists caught in Syria were about to end and they would also be repatriated soon, he added.
European nations have refused to take back citizens fighting for the group and stripped them of their citizenship, out of fear that their return would contribute to the spread of extremism in their countries.
A spokesman for the interior ministry was quoted as saying on Monday after state media said Ankara began repatriation of captured Islamic State militants. The United States and Turkey's Western allies have said Ankara's offensive could hinder the fight against ISIS and aid its resurgence.
What happens to foreign IS fighters has been a key question since the defeat of the group in territory it controlled in Syria and Iraq. It later stepped up security at its borders, including profiling possible IS fighters at airports and building a wall along parts of its porous border. Bosnia has introduced prison terms of up to 10 years for its citizens who fight in conflicts overseas or recruit others.
Governments may then find themselves accused of allowing back in unsafe men and women who pose a risk to national security. "Deal with them how you want", he added.
Seven German national Daesh terrorists will also be deported on November 14, he added.
"We will send three, five, 10 people back", Soylu said on Friday.
While German and Danish authorities have confirmed they were aware of the Turkish plans, French Defence Minister Florence Parly said she was not aware of them.
The ruling was a response to 23 Dutch women being held in detention camps in Syria, calling for their return along with their 56 children.